Method of forming integrated circuit contacts

ABSTRACT

Contacts are formed to integrated circuit devices by first forming a conductive layer ( 80 ) on a semiconductor device. An optional dielectric layer ( 130 ) is formed over the conductive layer and a carbon containing dielectric layer ( 140 ) is formed over the optional dielectric layer ( 130 ). Contacts are formed to the conductive layer ( 80 ) by etching openings in the carbon containing dielectric layer ( 140 ) and the optional dielectric layer ( 130 ).

This application is a divisional of application Ser. No. 10/350,691,filed Jan. 24, 2003 now U.S. Pat. No. 6,833,300.

FIELD OF THE INVENTION

This invention relates generally to the field of integrated circuitmanufacturing and more particularly to a method for forming contacts toelectronic devices.

BACKGROUND OF THE INVENTION

Integrated circuits comprise electronic devices such as transistors,resistors, and capacitors formed on a semiconductor substrate. Theindividual electronic devices are interconnected using a number oflayers of metal interconnects formed in alternating dielectric layersabove the surface of the semiconductor substrate containing the devices.Each electronic device that comprises the integrated circuit has to beconnected to the metal lines through the dielectric layers that overliethe semiconductor substrate surface. Typically a pre-metal dielectric(PMD) layer is formed over the semiconductor substrate following theformation of the electronic devices in the semiconductor substrate.Electrical contact is made to the underlying electronic devices byforming openings in the PMD layer and filling the openings with aconductive plug formed using a conductive material such as titaniumnitride, tungsten, or aluminum. The conductive plug (or plug) formed inthe openings will allow an electrical connection to be made from theelectronic devices to the various metal layers formed above the PMDlayer. An example of such an electrical connection made to a typicalmetal oxide semiconductor (MOS) transistor is shown in FIG. 1.

Shown in FIG. 1 is a typical MOS transistor fabricated using standardintegrated circuit processing methodology. Isolation regions 20 areformed in a semiconductor 10. A transistor gate stack comprising a gatedielectric layer 30 and a gate electrode 40 is formed on the surface ofthe semiconductor 10. The gate electrode usually comprises a conductivematerial such as doped polycrystalline silicon and various metals andsilicides. Typical thicknesses for the transistor gate stack are between800A and 5000A. Following the formation of the transistor gate stack anumber of self-aligned implants are performed. These self-alignedimplants include drain/source extension implant and pocket implants. Theself-aligned implants that are aligned to the transistor gate stack willresult in the formation of the doped regions 50 in the semiconductor 10.Sidewall structures 60 are formed adjacent to the gate electrode 40using standard processing technology. The sidewall structures 60typically comprise dielectric material such as silicon oxide, siliconnitride, or any other suitable dielectric material. Following theformation of the sidewall structures 60, the transistor source and drainregions 70 are formed by implanting suitable dopants into thesemiconductor 10. Following the formation of the source and drainregions 70, metal silicide layers 80 and 90 and formed on the source anddrain regions 70 and the gate electrode 40 respectively. The metalsilicide layers 80 and 90 will reduce the contact resistance between theMOS transistor and the metal layers. A PMD layer 100 is formed over theMOS transistor as shown in Figure and openings are 110 and 120 areformed in the PMD layer. Conductive plugs will be formed in the openingsand the openings are formed using standard integrated circuit processingtechniques.

Typically the openings 110 and 120 are formed by first forming patternedphotoresist on the PMD layer. The patterned photoresist will then act asa mask during the subsequent contact etching process used to form theopenings. It should be noted that the silicide layer 90 formed on thegate electrode 40 is about 800A to 5000A above the silicide layer 80formed on the source drain regions. This topographic variation makesperforming the contact etch down to the various silicide layersdifficult. The different height of the various silicide layers 80 and 90imply that the etch times required to form the various openings aredifferent. A major problem with forming the openings is that completingthe contact etch to the deeper silicide layers 80 may cause theshallower contact etch (i.e. the etch to silicide layer 90) to continuethrough silicide layer 90 removing a significant portion of the silicidelayer 90. This problem is often addressed by reducing the etch times forforming the deeper openings 110. However reducing the etch time for thedeeper openings may lead to under-etched openings resulting in anincreased contact resistance.

Topology variations across the wafer also require that the contact etchprocess contain about a 50% over-etch to ensure that all the openingsacross the semiconductor wafer are properly formed. This large over-etchresults in large contact resistance variations across the semiconductorwafer that make it more difficult to form precision integrated circuits.In addition to the above described MOS transistor other devices such asbipolar junction transistors (BJT) and metal-insulator-metal (MIM)capacitors are also susceptible to the above described contact etchproblems. There is therefore a need for a method of forming integratedcircuits that reduces and/or eliminates the contact etch formationproblems. The instant invention addresses this need.

SUMMARY OF THE INVENTION

The instant invention is a method for forming electrical contacts toelectronic devices formed as part of an integrated circuit. A conductivelayer is formed on electronic device such as a MOS transistor,capacitor, or bipolar junction transistor. An optional first dielectriclayer is formed over the conductive layer and a carbon containingdielectric layer formed over the optional dielectric layer if present. APMD dielectric layer is formed over the carbon containing dielectriclayer and openings are formed in the PMD layer. The openings are formedover the conductive layer, the optional dielectric layer, and the carboncontaining dielectric layer. The exposed regions of the carboncontaining dielectric layer and the optional dielectric layer (ifpresent) are removed to expose the underlying conductive layer. Aconductive material is then used to fill the opening and electricallycontact the conductive layer formed on the electronic device.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention and theadvantages thereof, reference is now made to the following descriptiontaken in conjunction with the accompanying drawings, wherein likereference numerals represent like features, in which:

FIG. 1 is a cross-sectional diagram showing a MOS transistor accordingto the prior art.

FIG. 2( a)–FIG. 2( d) are cross-sectional diagrams showing an embodimentof the instant invention.

FIG. 3( a)–FIG. 3( c) are cross-sectional diagrams showing an embodimentof the instant invention.

FIG. 4( a)–FIG. 4( c) are cross-sectional diagrams showing an embodimentof the instant invention.

DETAILED DESCRIPTION OF THE INVENTION

Shown in FIG. 2( a) to FIG. 2( d) are cross-sectional diagrams of afirst embodiment of the instant invention. Illustrated in FIG. 2( a) isa MOS transistor formed using known integrated circuit manufacturingmethods. As described above isolation regions 20 are formed in asemiconductor 10. A transistor gate stack comprising a gate dielectriclayer 30 and a gate electrode 40 is formed on the surface of thesemiconductor 10. The gate electrode usually comprises a conductivematerial such as doped polycrystalline silicon and various metals andsilicides. Typical thicknesses for the transistor gate stack are between800A and 5000A. Following the formation of the transistor gate stack anumber of self-aligned implants are performed. These self-alignedimplants include drain/source extension implant and pocket implants. Theself-aligned implants that are aligned to the transistor gate stack willresult in the formation of the doped regions 50 in the semiconductor 10.Sidewall structures 60 are formed adjacent to the gate electrode 40using standard processing technology. The sidewall structures 60typically comprise dielectric material such as silicon oxide, siliconnitride, or any other suitable dielectric material. Following theformation of the sidewall structures 60, the transistor source and drainregions 70 are formed by implanting suitable dopants into thesemiconductor 10. Following the formation of the source and drainregions 70, metal silicide layers 80 and 90 and formed on the source anddrain regions 70 and the gate electrode 40 respectively.

A first dielectric layer comprising silicon oxide 130 is formed over theMOS transistor structure of FIG. 2( a) as shown in FIG. 2( b). The firstdielectric layer 130 is optional and is included to prevent theinteraction of the gases used to form or etch subsequent layers with theunderlying silicide layers 80 and 90. A second dielectric layer 140 isformed on the first dielectric layer 130 as shown in FIG. 2( b). In anembodiment that does not comprise the optional first dielectric layer130, the second dielectric layer will be formed adjacent to the silicidelayers 80 and 90. In an embodiment of the instant invention the seconddielectric layer 140 comprises silicon carbide (SiC) in variouscrystalline and non-crystalline forms such as amorphous hydrogenatedsilicon carbide. The SiC layer can be formed using a plasma enhancedchemical vapor deposition (PECVD) method although any deposition processmay be employed in accordance with the invention. The preferred SiCdeposition process would use trimethylsilane as the silicon and carbonsource, and a carrier gas of helium, wherein argon, for example, mayalso be used in place of helium. Examples of other possible sourcegasses include tetraethylsilane, and silane/methane. It has been foundthat when depositing with helium, the deposition rates are much reduced,and hence, the thickness of thin layers is more controllable. Even moreimportantly, the films tend to be more dense, and have lower hydrogencontent, which significantly increases the film hardness and itsresistance to chemical attack. This then reduces the etchability of thismaterial, and improves etch selectivity of silicon oxide to SIC. Inother embodiments the second dielectric layer 140 can comprise siliconoxycarbide, silicon carbonitride, silicon oxycarbonitride and boroncarbide.

Following the formation of the second dielectric layer 140 a PMD layer100 is formed over the second dielectric layer 140 and the MOStransistor structure is as shown in FIG. 2( b). A patterned photoresistlayer 150 is formed on the PMD layer 100 that serves as an etch maskduring the etching of the PMD layer 100 to form the openings 170. Theetch process used to etch the PMD layer 100 is highly selective with anetch rate selectivity of at least 8 to 1 for The PMD dielectric 100 andthe second dielectric layer 140 respectively. This high selectivityallows the openings above the source and drain regions 70 to be formedwithout completely removing the exposed region of the second dielectriclayer 140 that lies above the gate electrode 40. Following the formationof the openings 170 the regions of the second dielectric layer 140exposed in the openings 170 are removed using an etch process. Thepatterned photoresist layer 150 need not be removed before etching theexposed regions of the second dielectric layer 140. In other embodimentshowever it might be advantageous to remove the patterned photoresistlayer 150 using standard semiconductor processing techniques beforeetching the second dielectric layer 140. In an embodiment where thesecond dielectric layer 140 comprises SiC, the SiC layer can be etchedusing a reactive ion etching (RIE) process that comprises chlorine orfluorine. In a further embodiment of the SiC RIE etch process, 1 to 10percent of oxygen can be added to the RIE etch that comprises chlorineor fluorine. The RIE etch process will remove the exposed regions of thesecond dielectric layer 140 without significantly attacking theunderlying layer. In the embodiment of the instant invention thatcomprises the optional first dielectric layer 130 a second etch processis required to remove the exposed regions of the first dielectric layer130 in the openings 170. The exposed regions of the first dielectriclayer 130 can be removed using RIE or wet chemical etch processes.Following the removal of the exposed regions of the first and seconddielectric regions 130 and 140 the structure is as shown in FIG. 2( c).If the patterned photoresist 150 is still present it is removed andconducting material can now be used to form electrical contacts to theMOS transistor gate electrode 40 and the source and drain regions 70.This is illustrated in FIG. 2( d) where conductive material such as ametal is used to form electrical contacts 180 to the MOS transistorsource and drain regions 70 as well as an electrical contact 190 to theMOS transistor gate electrode 40. The first embodiment of the instantinvention should not be confined to MOS transistor structure shown inFIGS. 2( a) to 2(e). The first embodiment of the instant invention isapplicable to any MOS transistor structure where the upper surface ofthe gate electrode is positioned above the upper surface of the sourceand drain regions.

Shown in FIG. 3( a) to FIG. 3( c) are cross-sectional diagrams of asecond embodiment of the instant invention. Illustrated in FIG. 3( a) isa bipolar junction transistor (BJT) formed using known integratedcircuit manufacturing methods. A highly doped buried layer 210 is formedin a semiconductor of a first conductivity type 200. Isolation regions220 are formed in the semiconductor 200. A first silicon layer of asecond conductivity type 240 is formed on the surface of thesemiconductor 200 and will act as the base of the BJT. A highly dopedregion 230 is formed in the semiconductor 200 to provide electricalcontact to the collector region of the BJT. Silicon oxide layers andsilicon nitride layers are deposited and etched to form the siliconoxide 250 and silicon nitride 260 structures. A second silicon layer 265of a first conductivity type is formed over the first silicon layer 240and the silicon nitride structures 260 and will function as the emitterregion of the BJT. In the BJT structure shown in FIG. 3( a) the firstconductivity type can be n-type and the second conductivity p-type orvice versa. Sidewall structures 270 are formed adjacent to the secondsilicon layer 265 and the silicon oxide 250 and silicon nitride 260structures as shown in FIG. 3( a). Conductive layers 280, 290, and 295are then formed on the regions of the first silicon layer 240, thesecond silicon layer 265 and the highly doped implanted region 230 toprovide low contact resistance contacts to the base, emitter, andcollector regions of the BJT respectively. These conductive layers 280,290, and 295 can comprise a metal silicide or any other suitableconductive material.

A first dielectric layer comprising silicon oxide 300 is formed over theBJT structure of FIG. 3( a) as shown in FIG. 3( b). The first dielectriclayer 300 is optional and is included to prevent the interaction of thegases used to form or etch subsequent layers with the underlying layers.A second dielectric layer 310 is formed on the first dielectric layer300 as shown in FIG. 3( b). In the embodiments that do not comprise theoptional first dielectric layer 300, the second dielectric layer will beformed adjacent to the conductive layers 280, 290, and 295. In anembodiment of the instant invention the second dielectric layer 310comprises silicon carbide (SiC) in various crystalline andnon-crystalline forms such as amorphous hydrogenated silicon carbide.The SiC layer can be formed using a plasma enhanced chemical vapordeposition (PECVD) method although any deposition process may beemployed in accordance with the invention. The preferred SiC depositionprocess would use trimethylsilane as the silicon and carbon source, anda carrier gas of helium, wherein argon, for example, may also be used inplace of helium. Examples of other possible source gasses includetetraethylsilane, and silane/methane. It has been found that whendepositing with helium, the deposition rates are much reduced, andhence, the thickness of thin layers is better controllable. Even moreimportantly, the films tend to be denser, and have lower hydrogencontent, which significantly increases the film hardness and itsresistance to chemical attack. This then reduces the etchability of thismaterial, and improves etch selectivity of silicon oxide to SiC. Inother embodiments the second dielectric layer 310 can comprise siliconoxycarbide, silicon carbonitride, silicon oxycarbonitride and boroncarbide.

Following the formation of the second dielectric layer 310 a PMD layer320 is formed over the second dielectric layer 310 and the BJT structureas shown in FIG. 3( b). A patterned photoresist layer 330 is formed onthe PMD layer 320 that serves as an etch mask during the etching of thePMD layer 320 to form the openings 340. The etch process used to etchthe PMD layer 320 is highly selective with an etch rate selectivity ofat least 8 to 1 for the PMD dielectric 320 and the second dielectriclayer 310 respectively. Following the formation of the openings 340 theregions of the second dielectric layer 310 exposed in the openings 340are removed using an etch process. The patterned photoresist layer 330need not be removed before etching the exposed regions of the seconddielectric layer 310. In other embodiments however it might beadvantageous to remove the patterned photoresist layer 330 usingstandard semiconductor processing techniques before etching the seconddielectric layer 310. In an embodiment where the second dielectric layer310 comprises SiC, the SiC layer can be etched using a reactive ionetching (RIE) process that comprises chlorine or fluorine. In a furtherembodiment of the SiC RIE etch process, 1 to 10 percent of oxygen can beadded to the RIE etch that comprises chorine or fluorine. This etchprocess will remove the exposed regions of the second dielectric layer310 without significantly attacking the underlying layers. In theembodiment of the instant invention that comprises the optional firstdielectric layer 300, a second etch process is required to remove theexposed regions of the first dielectric layer 300 in the openings 340.The exposed regions of the first dielectric layer 300 can be removedusing RIE or wet chemical etch processes. Following the removal of theexposed regions of the first and second dielectric regions 300 and 310,the remaining patterned photoresist layer 330 is removed if present andconducting material is used to form electrical contacts to the BJTemitter, base and collector regions. This is illustrated in FIG. 3( c)where conductive material such as a metal is used to form electricalcontacts 360 to the base of the BJT as well as electrical contacts 350and 370 to the emitter and collector regions of the BJT respectively.The second embodiment of the instant invention should not be confined toBJT structure shown in FIGS. 3( a) to 3(c). The second embodiment of theinstant invention is applicable to any BJT structure where the uppersurface of the emitter region is above the upper surface of the baseregions or above the upper surface of the collector region.

Shown in FIG. 4( a) to FIG. 4( c) are cross-sectional diagrams of athird embodiment of the instant invention. Illustrated in FIG. 4( a) ismetal-oxide-metal capacitor formed using known integrated circuitmanufacturing methods. An isolation region 410 is formed in asemiconductor. A polycrystalline silicon layer 420 is formed on theisolation structure 410 and sidewall structures 430 are formed adjacentto the polysilicon layer 410. A conductive layer 450 is formed on thepolycrystalline layer 420 that will serve as the first plate of thecapacitor. A dielectric layer 460 is formed over the conductive layer450 as shown in FIG. 4( a). The dielectric layer 460 will function asthe capacitor dielectric. A second conductive layer 470 is formed on thedielectric layer as shown in FIG. 4( a) and will function as the secondplate of the capacitor. It should be noted that the second conductivelayer 470 does extend over the entire length of the polysilicon layer420.

A first dielectric layer comprising silicon oxide 480 is formed over themetal-oxide-metal capacitor structure of FIG. 4( a) as shown in FIG. 4(b). The first dielectric layer 480 is optional and is included toprevent the interaction of the gases used to form or etch subsequentlayers with the underlying layers. A second dielectric layer 490 isformed on the first dielectric layer 480 as shown in FIG. 4( b). In theembodiments that do not comprise the optional first dielectric layer480, the second dielectric layer 490 will be formed adjacent to theconductive layer 470. In an embodiment of the instant invention thesecond dielectric layer 490 comprises silicon carbide (SiC) in variouscrystalline and non-crystalline forms such as amorphous hydrogenatedsilicon carbide. The SiC layer can be formed using a plasma enhancedchemical vapor deposition (PECVD) method although any deposition processmay be employed in accordance with the invention. The preferred SiCdeposition process would use trimethylsilane as the silicon and carbonsource, and a carrier gas of helium, wherein argon, for example, mayalso be used in place of helium. Examples of other possible sourcegasses include tetraethylsilane, and silane/methane. It has been foundthat when depositing with helium, the deposition rates are much reduced,and hence, the thickness of thin layers is better controllable. Evenmore importantly, the films tend to be denser, and have lower hydrogencontent, which significantly increases the film hardness and itsresistance to chemical attack. This then reduces the etchability of thismaterial, and improves etch selectivity of silicon oxide to SiC. Inother embodiments the second dielectric layer 490 can comprise siliconoxycarbide, silicon carbonitride, silicon oxycarbonitride and boroncarbide.

Following the formation of the second dielectric layer 490, a PMD layer500 is formed over the second dielectric layer 490 and themetal-oxide-metal capacitor structure as shown in FIG. 4( b). Apatterned photoresist layer 510 is formed on the PMD layer 500 thatserves as an etch mask during the etching of the PMD layer 500 to formthe openings 520. The etch process used to etch the PMD layer 500 ishighly selective with an etch rate selectivity of at least 8 to 1 forThe PMD dielectric 500 and the second dielectric layer 490 respectively.Following the formation of the openings 520, the regions of the seconddielectric layer 490 exposed in the openings 520 are removed using anetch process. The patterned photoresist layer 510 need not be removedbefore etching the exposed regions of the second dielectric layer 490.In other embodiments however it might be advantageous to remove thepatterned photoresist layer 510 using standard semiconductor processingtechniques before etching the second dielectric layer 490. In anembodiment where the second dielectric layer 490 comprises SiC, the SiClayer can be etched using a reactive ion etching (RIE) process thatcomprises chlorine or fluorine. In a further embodiment of the SiC RIEetch process, 1 to 10 percent of oxygen can be added to the RIE etchcomprising chlorine or fluorine. This etch process will remove theexposed regions of the second dielectric layer 490 without significantlyattacking the underlying layers. In the embodiment of the instantinvention that comprises the optional first dielectric layer 480, asecond etch process is required to remove the exposed regions of thefirst dielectric layer 480 in the openings 520. The exposed regions ofthe first dielectric layer 480 can be removed using RIE or wet chemicaletch processes. Following the removal of the exposed regions of thefirst and second dielectric regions 480 and 490, the patternedphotoresist layer 510 is removed if still present, and conductingmaterial is used to form electrical contacts to the metal regions of themetal-oxide-metal capacitor. This is illustrated in FIG. 4( c) whereconductive material such as a metal is used to form electrical contacts530 and 540. The third embodiment of the instant invention should not beconfined to metal-oxide-metal capacitor structure shown in FIGS. 4( a)to 4(c). The third embodiment of the instant invention is applicable toany capacitor structure where electrical contacts are formed to themetal plates of the capacitor.

While this invention has been described with reference to illustrativeembodiments, this description is not intended to be construed in alimiting sense. Various modifications and combinations of theillustrative embodiments, as well as other embodiments of the inventionwill be apparent to persons skilled in the art upon reference to thedescription. It is therefore intended that the appended claims encompassany such modifications or embodiments.

1. A method of forming an integrated circuit, comprising: forming aconductive layer over a first region of a semiconductor; forming adielectric layer comprising carbon over said conductive layer; forming aPMD dielectric layer over said dielectric layer and said conductivelayer; forming at least one opening in said PMD dielectric layer oversaid conductive layer thereby exposing a region of said dielectriclayer; removing said exposed region of said dielectric layer; andforming a first conductive region in said opening of said PMD layerwherein said first conductive region contacts said conductive layer. 2.The method of claim 1 wherein said dielectric layer is formed from amaterial selected from the group consisting of silicon carbide, siliconoxycarbide, silicon carbonitride, silicon oxycarbonitride and boroncarbide.
 3. The method of claim 1 wherein said removing said exposedregion of said dielectric layer comprises using a RIE etch comprisingchlorine.
 4. The method of claim 1 further comprising forming a seconddielectric layer between said conductive layer and said dielectriclayer.
 5. A method of forming an integrated circuit contact, comprising:forming a conductive layer over a first region of a semiconductor;forming a first dielectric layer over said conductive layer; forming asecond dielectric layer comprising carbon over said first conductivelayer; forming a PMD dielectric layer over said second dielectric layerand said conductive layer; forming at least one opening in said PMDdielectric layer over said conductive layer thereby exposing a region ofsaid second dielectric layer; removing said exposed region of saidsecond dielectric layer thereby exposing a region of said firstdielectric layer; removing said exposed region of said first dielectriclayer; and forming a first conductive region in said opening of said PMDlayer wherein said first conductive region contacts said conductivelayer.
 6. The method of claim 5 wherein said second dielectric layer isformed from a material selected from the group consisting of siliconcarbide, silicon oxycarbide, silicon carbonitride, siliconoxycarbonitride and boron carbide.
 7. The method of claim 6 wherein saidremoving said exposed region of said second dielectric layer comprisesusing a RIE etch comprising chlorine.